ISO 63 Vacuum Viewport — ISO 63 Sight Glass for High Vacuum
ISO vacuum sight glass for compact high-vacuum systems. Borosilicate, fused silica & sapphire options. Quick-fit KF/DN flange with optional AR coatings.
Description
A ISO-63 vacuum sight glass (ISO63 viewport) is a compact, clamp-style flanged optical window engineered for vacuum process observation, alignment and in-chamber inspection. The window is sealed to a stainless-steel KF flange using vacuum-compatible methods (Viton O-rings or metal gaskets), delivering reliable vacuum integrity and repeatable sealing performance. Typical window materials include borosilicate glass, fused silica (quartz) and sapphire — selected according to transmission requirements, thermal resistance and process conditions.
Key Benefits
- ISO 63 flange — compatible with standard KF hardware (clamps, centering rings, and O-rings) for quick installation and removal.
- High-vacuum compatible sealing — O-ring or metal-sealed construction ensures low leak rate and repeatable performance.
- Material options — optical borosilicate, fused silica (quartz) for UV, or sapphire for the highest mechanical/thermal robustness.
- Compact and easy to use — ideal for small systems or quick-access optical ports.
- Custom sizes and materials — ISO63 / ISO80 / ISO100 versions also available; CAD drawings and small-batch manufacturing supported.
Why choose the ISO 63 viewport？
ISO sight glasses are widely used where compact, reliable optical access is required in vacuum systems. The clamp-style KF connection enables rapid assembly and maintenance without specialized tools. Quartz and sapphire options support elevated bakeout temperatures and superior transmission for lasers, spectroscopy and plasma monitoring. Provide your operating pressure, maximum temperature and optical wavelength and our engineering team will recommend the optimal window material, surface quality and sealing configuration.
Typical Technical Specifications
| Product model | ISO63 |
|---|---|
| Product vacuum degree | 1E*10-12 pa·m³/s |
| Flange material | 304 |
| Glass material | Borosilicate / Quartz (Fused Silica) / Sapphire / Barium Fluoride / Calcium Fluoride / Zinc Selenide |
| Surface quality | 60/40, 50/20, 20/10 |
| Optical surface type | 1/2 – 1/10 |
| Visible diameter (mm) | 53 |
| Heat resistance range | -50 ～ 230℃ |
| Surface treatment | Electrolytic polishing |
| Transmittance | 1.45 ～ 1.57 |
| Center distance(mm) | 72 |
| Inner diameter (mm) | 95 |
| Product Height(mm) | 53 |
| Thickness | 27 |
| Glass thickness | 10 |
Applications & industries
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Semiconductor equipment (process monitoring, plasma observation).
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Vacuum coating & thin-film deposition systems.
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Laboratory and R&D vacuum chambers.
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Laser alignment & spectroscopy setups.
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Analytical and measurement instruments.
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Optical diagnostics in high-vacuum environments.
