YT-2230 Synthetic Quartz Tube — Semiconductor-Grade Fused Silica Tube (SiO₂ ≥99.9999%)

YT-2230 Synthetic Quartz Tube — Semiconductor-Grade Fused Silica Tube (SiO₂ ≥99.9999%)

LUMIGLAS® YT-2230 is a semiconductor-grade synthetic quartz tube manufactured from ultra-high purity fused silica (SiO₂ ≥99.9999%). All major metallic impurities are controlled below 0.005 ppm (wt), making it suitable for diffusion furnaces, CVD process chambers, LPCVD reaction tubes and quartz boat holders in silicon wafer fabrication. Available OD range ≤10 mm to 60–90 mm; lengths to 3000 mm. Custom dimensions and precision grades on request.

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Description

The LUMIGLAS® YT-2230 synthetic quartz tube is an ultra-high purity fused silica process tube engineered for semiconductor diffusion furnaces, CVD and LPCVD reaction chambers, and other process equipment where metallic contamination and dimensional variability must be controlled to the tightest tolerances. Manufactured from synthetic fused silica with SiO₂ purity ≥99.9999%, the YT-2230 controls all ten major metallic impurity elements to below 0.005 ppm (wt) — meeting the contamination requirements of advanced silicon wafer fabrication processes.

Because semiconductor process yield is directly affected by trace metallic contamination from quartz components, engineers specify the YT-2230 wherever a high-purity quartz tube must combine ultra-low impurity content with precise OD/WT tolerances and a stringent bubble inclusion standard. Available in outer diameters from ≤10 mm to the 60–90 mm range with lengths up to 3000 mm, the YT-2230 covers the majority of standard diffusion tube and process tube sizes. Consequently, custom dimensions and precision grades are also available for specialised process requirements.

Technical Specifications — YT-2230 Synthetic Quartz Tube

YT-2230 — Key Specification Summary
Parameter Value / Grade
Product Type Semiconductor-grade synthetic quartz tube (fused silica tube)
Material Synthetic fused silica — SiO₂ ≥99.9999% (6N grade)
OH Content Ultra-low hydroxyl (low-OH) grade
Metallic Impurities All major elements (Li, Na, K, Mg, Ca, Cu, Al, Cr, Fe, Ti) <0.005 ppm (wt)
Max. Service Temperature ~1200°C (continuous service)
Thermal Expansion 0.55 × 10⁻⁶ /°C — near-zero thermal expansion
OD Range ≤10 mm · 10–40 mm · 40–60 mm · 60–90 mm
Max. Length Up to 3000 mm (OD range dependent)
Transparency Clear / transparent grade
Material Certificate Full impurity analysis Certificate of Conformity (CoC) supplied as standard

Major Metallic Impurity Content — YT-2230

All values in ppm (wt). Full impurity analysis Certificate of Conformity (CoC) provided as standard with each order.

Grade Li Na K Mg Ca Cu Al Cr Fe Ti
<0.005 ppm <0.001 <0.005 <0.002 <0.001 <0.003 <0.001 <0.003 <0.001 <0.001 <0.001

Geometric Specifications & Dimensional Tolerances

OD = outer diameter (mm) · WT = wall thickness (mm). Custom precision grades available on request.

Parameter Outer Diameter OD (mm) — Size Range
≤10 10 – 40 40 – 60 60 – 90
OD range (mm) ≤10 10–40 40–60 60–90
WT (mm) ≤1.5 1.0–10 2–15 2–30
OD Tolerance (mm) ±0.2 ±0.50 ±0.80 ±2.00
WT Tolerance (mm) ±0.20 ±0.30 ±0.30 ±3.00
Out-of-Roundness (mm) ≤0.08 ≤0.15 ≤0.40 ≤0.40
Wall Eccentricity (mm) ≤0.08 ≤0.15 ≤0.45 ≤0.45
CSA Relative Difference ≤3.0% ≤6.0% ≤6.0% ≤6.0%
Bow (mm/m) ≤0.40 ≤0.70 ≤0.70 ≤0.70
Length (mm) ≤2000 ≤3000 ≤3000 ≤2000

* Custom dimensions, tighter tolerances and special precision grades available on request. Provide OD × WT × Length (mm) when enquiring.

Optical Quality Standard — Bubble Inclusion Count

Maximum allowable bubble count per metre of tube length, by bubble diameter and wall thickness class.

Bubble Diameter (mm) Wall Thickness — Max. Allowable Count (no./m)
≤3 mm >3 – ≤10 mm >10 – ≤25 mm >25 mm
>0.2 – ≤0.5 1 3 14 21
>0.5 – ≤1.0 0 1 6 9

All bubbles characterised by width; length must not exceed 8 mm. Bubbles ≤0.2 mm not counted. *WT ≤3 mm: open bubbles not permitted. Inclusions >0.2 mm width not permitted. No visible surface defects to naked eye.

Why Specify YT-2230 for Semiconductor Process Equipment?

Trace metallic contamination from quartz components is a well-documented yield loss mechanism in semiconductor diffusion and CVD processes. Conventional fused quartz tubes sourced from natural quartz sand contain measurable levels of Li, Na, Al, Fe and other metallic impurities that can migrate into the silicon wafer stack at elevated process temperatures. In contrast, the YT-2230 uses synthetic fused silica produced by chemical vapour deposition — achieving SiO₂ purity of 99.9999% and controlling all major metallic impurities to sub-part-per-billion levels.

6N Purity — SiO₂ ≥99.9999%

Synthetic CVD-grade fused silica with all metallic contaminants controlled to <0.005 ppm — meeting the requirements of advanced node semiconductor process equipment.

Tight Dimensional Tolerances

OD tolerance ±0.2 mm (≤10 mm OD) to ±2.00 mm (60–90 mm OD), with out-of-roundness ≤0.08 mm for the smallest sizes — enabling reliable sealing and consistent furnace loading.

Near-Zero Thermal Expansion

Thermal expansion coefficient of 0.55 × 10⁻⁶ /°C — the quartz tube survives rapid thermal cycling from ambient to 1200°C without cracking or dimensional change.

Full Traceability

Full impurity analysis Certificate of Conformity (CoC) supplied with every order — essential for semiconductor equipment qualification and process documentation requirements.

Typical Applications

  • ▸Semiconductor diffusion furnace process tubes — replacement for conventional fused quartz tubes in oxidation, LPCVD, annealing and doping furnaces
  • ▸CVD and LPCVD reaction chamber components — liner tubes, injector tubes and susceptor sleeves requiring ultra-low metallic contamination
  • ▸Quartz boat holders and protective sheaths — for silicon wafer boats in vertical and horizontal furnace configurations
  • ▸Thermal oxidation and diffusion tubes — for boron and phosphorus doping processes in silicon wafer fabrication
  • ▸High-purity laboratory and analytical instrument components — wherever sub-ppb metallic contamination control is required in quartz glassware

Technical Document & Download

📄 Technical Datasheet — YT-2230

Full impurity data, geometric tolerances, dimensional table and optical quality standard.

Download PDF →

Frequently Asked Questions

What is the difference between synthetic quartz tube and natural fused quartz tube?

Natural fused quartz tubes come from melting natural quartz crystal or quartz sand, which contains inherent metallic impurities (Na, Al, Fe, Ti and others) at the ppm level. Synthetic quartz tubes, by contrast, are produced by chemical vapour deposition (CVD) from ultra-pure silicon-containing precursors — achieving SiO₂ purity of 99.9999% or higher with metallic impurities in the sub-ppm range. For semiconductor process applications where trace metallic contamination causes yield loss, synthetic fused silica tubes like the YT-2230 are therefore the required specification.

What is the maximum service temperature of the YT-2230 quartz tube?

The YT-2230 synthetic quartz tube handles continuous service to approximately 1200°C. Short-term excursions up to around 1250°C are possible, but sustained operation above the continuous rated temperature causes devitrification (crystallisation) of the silica matrix, which permanently degrades the tube. For most semiconductor furnace applications — including thermal oxidation, LPCVD and diffusion at 900–1100°C — the YT-2230 provides a comfortable operational margin.

What information do I need to provide when ordering?

To specify a YT-2230 synthetic quartz tube, provide: OD (outer diameter in mm) × WT (wall thickness in mm) × Length (mm), required precision grade, quantity, and whether a Certificate of Conformity with full impurity analysis is needed. For non-standard dimensions or tighter tolerances than the standard grade, Lumistar can advise on feasibility and lead time.

Is the YT-2230 available in custom OD and length?

Yes. While the standard dimensional table covers OD ranges from ≤10 mm through 60–90 mm with lengths up to 3000 mm, Lumistar accepts custom orders outside these standard ranges. Custom OD, WT, length and tighter precision tolerances are all available — contact us with your drawing or specification for a feasibility assessment and quotation.

What does the bubble inclusion standard mean for process performance?

In semiconductor process tubes, bubbles in the quartz wall act as stress concentrators that can lead to tube cracking during thermal cycling, particularly at rapid ramp rates. The YT-2230 bubble inclusion standard limits the count and size of bubbles per metre of tube length by wall thickness class — ensuring that the tube wall is mechanically sound and free of inclusions that could propagate under thermal stress. For the thinnest wall class (≤3 mm), even bubbles in the 0.5–1.0 mm range are not permitted, reflecting the most stringent requirement.

Request a Quote — LUMIGLAS® YT-2230 Synthetic Quartz Tube

Specify: OD × WT × Length (mm) · Quantity · Precision grade · CoC required

sophia@js-lumiglas.com|WhatsApp: +86 189 1303 5768

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