LUMIGLAS® YT-220 large-format synthetic quartz tube — high-purity fused silica OD φ200–350 mm, for semiconductor diffusion furnace outer tube and sleeve assemblies

YT-220 Large-Format Synthetic Quartz Tube — High-Purity Fused Silica Furnace Tube (OD φ200–350 mm)

LUMIGLAS® YT-220 is a high-purity large-format synthetic quartz tube produced from 6N-grade fused silica (SiO₂ ≥99.9999%) with all metallic impurities controlled below 0.005 ppm (wt). Designed for semiconductor diffusion furnace outer tubes, oxidation furnace jacket tubes and large-OD sleeve assemblies. Standard OD range φ200–350 mm, wall thickness 6–15 mm, maximum length 1500 mm. Custom dimensions available.

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Description

The LUMIGLAS® YT-220 large synthetic quartz tube is a high-purity fused silica furnace tube engineered for semiconductor diffusion furnace outer tubes, oxidation furnace jacket sleeves and large-OD quartz sleeve assemblies. Produced from synthetic fused silica with SiO₂ purity ≥99.9999% (6N grade), the YT-220 controls all ten major metallic impurity elements to below 0.005 ppm (wt) — meeting the ppb-level contamination requirements of production-scale silicon wafer thermal processing.

Unlike natural fused quartz tubes, which carry inherent metallic impurities from the source sand, the YT-220 uses CVD-derived synthetic silica to achieve true 6N purity with ultra-low OH hydroxyl content. In addition, the tube wall is produced to a bubble-free standard — no bubbles are visible to the naked eye — eliminating the stress concentrators that cause premature cracking in large-OD furnace tubes during thermal cycling. Consequently, the YT-220 delivers the purity, dimensional stability and thermal durability required for high-volume semiconductor furnace applications.

Technical Specifications — YT-220 Large Synthetic Quartz Tube

YT-220 — Key Specification Summary
Parameter Value / Grade
Product Type High-purity large-format synthetic quartz tube / large diameter fused silica tube
Material Synthetic fused silica — SiO₂ ≥99.9999% (6N grade)
OH Content Ultra-low hydroxyl (low-OH) grade
Metallic Impurities All major elements (Li, Na, K, Mg, Ca, Cu, Al, Cr, Fe, Ti) <0.005 ppm (wt)
Max. Service Temperature ~1200°C continuous service
Thermal Expansion 0.55 × 10⁻⁶ /°C — near-zero thermal expansion
OD Range φ200 – 350 mm
Wall Thickness (WT) 6 – 15 mm (standard); up to 35 mm available
Max. Length ≤1500 mm
Bubble Standard No bubbles visible to the naked eye
Material Certificate Full impurity analysis Certificate of Conformity (CoC), supplied as standard

Major Metallic Impurity Content — YT-220

All values in ppm (wt). Full impurity analysis Certificate of Conformity (CoC) provided as standard with every order.

Grade Li Na K Mg Ca Cu Al Cr Fe Ti
YT-220 <0.001 <0.005 <0.002 <0.001 <0.003 <0.001 <0.003 <0.001 <0.001 <0.001

Geometric Specifications & Dimensional Tolerances

OD = outer diameter · WT = wall thickness. Custom dimensions and tighter tolerances available on request — specify OD × WT × Length (mm) when enquiring.

Grade OD (mm) WT (mm) OD Tol. (mm) WT Tol. (mm) Out-of-Round. (mm) Eccentricity (mm) CSA Rel. Diff. Bow (mm/m) Length (mm)
Large-Format
Sleeve Tube		 200–350 6–35 ±1.50 ±1.00 ≤0.40 ≤0.45 ≤6.0% ≤0.70 ≤1500

* Custom OD, WT and length outside the standard range available on request. Provide drawing or OD × WT × Length specification when enquiring.

Why Specify YT-220 for Large-OD Diffusion Furnace Applications?

In large-OD semiconductor furnace tubes, two failure mechanisms drive replacement cycles — metallic contamination migration and thermally-induced cracking. Conventional natural fused quartz tubes carry ppb-to-ppm level Na, Al and Fe impurities that migrate into the wafer stack at 900–1100°C process temperatures. Furthermore, bubble inclusions in the tube wall act as stress concentrators, accelerating crack initiation during the rapid thermal ramp cycles typical of production furnaces. The YT-220 addresses both mechanisms: 6N synthetic silica eliminates metallic contamination, while the bubble-free wall standard removes the structural weak points that cause premature tube failure.

6N Purity — SiO₂ ≥99.9999%

Synthetic CVD-grade fused silica eliminates the metallic impurities present in natural quartz sand. All major elements are controlled to <0.005 ppm (wt) — meeting ppb-level requirements for advanced semiconductor furnace applications.

Bubble-Free Wall Standard

No bubbles visible to the naked eye — the YT-220 wall is free of inclusion defects that act as stress concentrators during thermal cycling, delivering longer service life in production furnace environments.

Large OD up to φ350 mm

The YT-220 covers the φ200–350 mm OD range required for horizontal and vertical diffusion furnace outer tubes and jacket sleeves — sizes not available in standard small-format quartz tube product lines.

Ultra-Low OH Content

Ultra-low hydroxyl (low-OH) grade minimises OH-related infrared absorption and reduces hydroxyl diffusion into the process environment — critical for dry oxidation and high-temperature annealing processes.

Typical Applications

  • ▸Diffusion furnace outer tubes and jacket sleeves — large-OD outer shell for horizontal and vertical silicon wafer diffusion furnaces, OD φ200–350 mm
  • ▸Thermal oxidation furnace outer tubes — protective and structural outer sleeve in dry and wet oxidation furnaces for silicon wafer processing
  • ▸LPCVD and CVD furnace jacket tubes — large-diameter outer containment sleeve in low-pressure chemical vapour deposition furnace configurations
  • ▸High-temperature annealing and RTP accessories — large-OD quartz sleeve components in rapid thermal processing and annealing furnace systems
  • ▸Semiconductor OEM quartz components — custom large-format quartz tube fabrication for semiconductor equipment manufacturers requiring non-standard OD, WT or length specifications

Technical Document & Download

📄 Technical Datasheet — YT-220

Full impurity data, product characteristics, geometric tolerance table and ordering specification.

Download PDF →

Frequently Asked Questions

What is the difference between YT-220 and YT-2230?

Both the YT-220 and YT-2230 are semiconductor-grade synthetic quartz tubes produced from 6N-purity fused silica with identical metallic impurity limits (<0.005 ppm for all major elements). However, they target different size ranges: the YT-2230 covers small-to-medium OD from ≤10 mm through 60–90 mm and is used for inner process tubes, CVD liners and quartz boat holders, while the YT-220 is a large-format tube covering OD φ200–350 mm specifically for furnace outer tubes, jacket sleeves and large-OD containment structures. For standard diffusion furnace installations, both tubes are typically used together — YT-2230 as the inner process tube and YT-220 as the outer jacket.

Why is a bubble-free standard important for large quartz furnace tubes?

In large-OD quartz tubes, bubble inclusions in the tube wall act as stress concentrators during thermal cycling. Because large-diameter tubes have greater thermal mass and experience higher thermal gradients across the wall during ramp-up and ramp-down, these stress concentrations can initiate cracks far more readily than in smaller tubes. By producing the YT-220 to a bubble-free standard — no bubbles visible to the naked eye — Lumistar eliminates this crack initiation mechanism, delivering longer service life and fewer unplanned furnace shutdowns for tube replacement.

What OD sizes are available for the YT-220?

The standard YT-220 range covers OD φ200 to φ350 mm with wall thickness 6–15 mm (standard) or up to 35 mm. Maximum length is 1500 mm. For OD, WT or length specifications outside this standard range, Lumistar accepts custom orders — provide your OD × WT × Length drawing or specification for a feasibility assessment and lead time confirmation.

What does ultra-low OH content mean for furnace tube performance?

Hydroxyl (OH) groups within the fused silica matrix absorb infrared radiation at specific wavelengths and can diffuse out of the tube wall into the process environment at elevated temperatures. In dry oxidation and high-temperature annealing processes, OH contamination from a high-OH quartz tube can affect the oxide quality and surface chemistry of the silicon wafer. The YT-220 uses ultra-low OH synthetic fused silica to minimise both IR absorption effects and OH out-diffusion, making it the correct specification for dry oxidation and sensitive thermal processes.

How do I order a YT-220 large synthetic quartz tube?

To order, provide: OD (mm) × WT (mm) × Length (mm), quantity, and whether a Certificate of Conformity with full impurity analysis is required. For standard dimensions within the φ200–350 mm OD range and ≤1500 mm length, lead times are typically 3–6 weeks. For custom dimensions outside the standard range, contact Lumistar with your drawing for feasibility confirmation and a lead time estimate.

Request a Quote — LUMIGLAS® YT-220 Large Synthetic Quartz Tube

Specify: OD × WT × Length (mm) · Quantity · CoC required · Custom dimensions welcome

sophia@js-lumiglas.com|WhatsApp: +86 189 1303 5768

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